I do these kind of jobs using normally a simple custom for the job vacuum fixture made from wood or plywood. Vacuum seals cut with scissors from 60x40cm EVA rubber sheet found from any asian shop for 60 cents / here in Spain/ .

Or use the thinnest double sided tape and make sure you have tape at the center so the piece will not bend. probably will have to take the protective sheet from the bottom side as this may cause the problems.

0.02mm depth of cut is too small. use spring loaded diamond drag for such jobs, as it gives exactly that depth/ width and is much cleaner from what i see on picture.